Semiconductor Manufacturing Technology

by Michael Quirk, Julian Serda

Publisher: Prentice Hall
ISBN: 0130815209

Check price @ amazon.com , amazon.ca , amazon.co.uk

Book Description

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

Customer Reviews

It's amazing! I just recently joined a company which deals with semiconductor manufacturing. This book helped me to understand all the basic of semiconductor manufacturing. Without this book I think I'll be lost. It's up to date (as far as my current work is) and it provides all the technical info I required without the complexity of the mathematics. This book is not only for students but for all, especially those involve in semiconductor business. It gives me confident with my work as I'm able to sit with the experts without fear being loss with all the technical jargons. It is a must for those in the semiconductor business whether you are an expert or a beginner like me.

This book is well worth the price if you are looking for an understanding of how semiconductors are made. Although it would be useful to have an engineering degree in order to understand all of it, it isn't necessary. The first couple of pages in each chapter are easy to read and as you gain knowlegde, the book simply expands for you. If I have a complaint, it would be that the book doesn't fit easily in my briefcase!